Advanced Ion Implantation & Beam Tools

Ion implantation and beam tools are crucial for doping semiconductors with precision. They enhance chip performance by allowing tailored electrical characteristics.

  1. KAUFMAN & ROBINSON END-HALL ION SOURCE WITH WATER COOLED FRONT PLATE

    Other Ion Beam Equipment

    KAUFMAN & ROBINSON END-HALL ION SOURCE WITH WATER COOLED FRONT PLATE

    Gridless End-Hall Ion Source With Water Cooled Front Plate

  2. Implanter Varian Viision 200+

    High Current Implanters

    Implanter Varian Viision 200+

    200 mm Implanter in very good condition

    Price net 982k$  based on Incoterm FCA, as is without warranty

  3. Amat E500

    Medium Current Implanters

    Amat E500

    -Back end medium current Implanter

    - 100002956  

  4. AXCELIS_OPTIMA_HD

    High Current Implanters

    AXCELIS_OPTIMA_HD

  5. AMAT E500

    High Current Implanters

    AMAT E500

    › Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8"  Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Any doubts that the tool is failure free useable for the next three years?Yes› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM

    Make: AMAT

    Model: Back end Implanter Amat E500

    1 unit @ Best Price

    Kulim, Malaysia

    Item 259241

  6. Axcelis NV8250HT #941

    Medium Current Implanters

    Axcelis NV8250HT #941

    Equipment Konfiguration: Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002Date of first usage:buyed new from vendorCurrent Condition: GoodCE-Conformity:YesLocation:greyroomVoltage:208VCryo-Pumps:3x CTI/Edwards Onboard: OB-8Cryo-Kompressor:CTI 9650 Low-VoltageTurbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003CRough-Pumps:Edwards: without QDP40, not includedEndstation Rough-Pump:not includedWafersize:8inch(200mm)Clamp-Type:E-Chuck green with Non-µC ControllerWafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)Gasbox:Modular 5-String, 4x 2,0L SizeString1:Argon Carriergas; MFC Unit-1662 2sccm BF3String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3Beam-Profiler Type:Belt-DriveGear-Type's:Scan: Planetary  Tilt: PlanetarySource-Type:ELS4 IHC-Source without VaporizerHV-Transformer:Silicon-OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSolaris SUN AXI 3HE (Special case)Second-WorkstationSolaris SUN Sparc5Software-Version:5.1.4.1Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 TypeNotes:Upper-Rack Panel missing Clean-Room Table missing on frontside all 4 wheels on oil-isolation transformer are broken Minor modifications on tool No Manual-Set/ no Spares include tool was used 24/7 full in production between 15 and 230kv Energy If required, tool can be inspected on site, but no Power
  7. AXCELIS NV8200P

    Medium Current Implanters

    AXCELIS NV8200P

    MCINV8202

    › Original Equipment Manufacturer? Axcelis

    › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

    › A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

    › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

    › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

    › Date of first usage? 2006

    › Technic special customized for Infineon? We don’t use water cool for the platen.

    › Correct maintained? Yes.

    › Any damages/deficits known? No

    › Manuals existing? Yes.

    › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

    › Any upgrades / extensions? No.

    › Useable for which products? 8 inch product

    › Wafer size (if applicable)? 8 inch

    › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

    › Procured from OEM or from second hand? Second hand.

    › Any refurbishments done? No.

    › Any doubts that the tool is failure free useable for the next three years? No.

    › Was there a significant system failure in the last three years? No.

    › Any contaminations known? No

    › IFX Inventory number? 100001850

  8. AXCELIS NV8200P

    Medium Current Implanters

    AXCELIS NV8200P

    -MCINV8201

    › Original Equipment Manufacturer? Axcelis

    › Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

    › OEM Serial ID?

    › Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

    › Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

    › Manufacturing date of the Equipment ?

    › Date of first usage? 2006

    › Technic special customized for Infineon? We don’t use water cool for the platen.

    › Correct maintained? Yes.

    › Any damages/deficits known? No

    › Manuals existing? Yes.

    › Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

    › Any upgrades / extensions? No.

    › Useable for which products? 8 inch product

    › Wafer size (if applicable)? 8 inch

    › Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

    › Procured from OEM or from second hand? Second hand.

    › Any refurbishments done? No.

    › Any doubts that the tool is failure free useable for the next three years? No.

    › Was there a significant system failure in the last three years? No.

    › Any contaminations known? No

    › IFX Inventory number? 100000605

Common Applications

Semiconductor Doping

Chip Fabrication

Nanostructure Creation

Surface Modification

Material Analysis

Device Customization

Buying Guide

Buying Guide

  • Assess the required implantation current and energy levels for your application.
  • Consider the tool's compatibility with existing fabrication lines.
  • Evaluate the availability of spare parts and maintenance support.
  • Review the tool's history of performance and reliability in similar settings.

Frequently Asked Questions

What are ion implantation tools used for?
Ion implantation tools are used in semiconductor manufacturing to introduce impurities into substrates, a process known as doping. This modifies the electrical properties of the semiconductor to achieve desired characteristics for electronic devices.
How do beam tools work in semiconductor processing?
Beam tools direct a controlled stream of ions toward the semiconductor material. This precisely alters the material's properties by embedding ions at specific depths and concentrations.
What are the benefits of using corporate surplus equipment?
Corporate surplus equipment offers cost savings, immediate availability, and access to high-quality tools that have been well-maintained, enabling quick scaling of production capabilities.
Which brands are known for high-quality ion implantation tools?
Renowned brands include Varian, Axcelis, Applied Materials, Nissin Ion Equipment, and Eaton.